Piezo displacement sensors for a compact high-speed x–y nanopositioner in differential actuation mode
- Creator: Bazaei, Ali , Boudaoud, Mokrane , Ettefagh, Massoud Hemmasian , Chen, Zhiyong , Regnier, Stephane
- Resource Type: journal article
- Date: 2022
Non-collocated displacement sensing by semiconductor strain gauges in differentially piezo-driven nanopositioners
- Creator: Bazaei, Ali , Boudaoud, Mokrane , Ettefagh, Massoud Hemmasian , Chen, Zhiyong , Regnier, Stephane
- Resource Type: journal article
- Date: 2021
Tracking control of a monolithic piezoelectric nanopositioning stage using an integrated sensor
- Creator: Omidbeike, Meysam , Teo, Yik R. , Yong, Yuen K. , Fleming, Andrew J.
- Resource Type: conference paper
- Date: 2017
MEMS nanopositioner for on-chip atomic force microscopy: a serial kinematic design
- Creator: Maroufi, Mohammad , Fowler, Anthony G. , Reza Moheimani, S. O.
- Resource Type: journal article
- Date: 2015
MEMS-based nanopositioning for on-chip high-speed scanning probe microscopy
- Creator: Maroufi, Mohammad
- Resource Type: thesis
- Date: 2015
Control of a novel 2-DoF MEMS nanopositioner with electrothermal actuation and sensing
- Creator: Rakotondrabe, Micky , Fowler, Anthony G. , Moheimani, S. O. Reza
- Resource Type: journal article
- Date: 2014
Sensorless damping control of a high speed flexure guided nanopositioner
- Creator: Fairbairn, Matthew W. , Wadikhaye, Sachin P. , Moheimani, S. O. Reza
- Resource Type: conference paper
- Date: 2014
Design of an inertially counterbalanced z-nanopositioner for high-speed atomic force microscopy
- Creator: Yong, Y. K. , Mohemani, S. O. R.
- Resource Type: journal article
- Date: 2013
Design, modeling, and FPAA-based control of a high-speed atomic force microscope nanopositioner
- Creator: Yong, Yuen Kuan , Bhikkaji, Bharath , Moheimani, S. O. Reza
- Resource Type: journal article
- Date: 2013
Sensor fusion for improved control of piezoelectric tube scanners
- Creator: Fleming, Andrew J. , Wills, Adrian G. , Moheimani, S. O. Reza
- Resource Type: journal article
- Date: 2008